In some embodiments, a micromechanical filter includes multiple subfilters, each subfilter comprising multiple piezoelectric resonators mechanically coupled in series, wherein the subfilters are mechanically coupled to each other in parallel.
Wu, I-Tsang; Dewdney, Julio Mario; and Wang, Jing, "Micromechanical devices based on piezoelectric resonators" (2016). USF Patents. 837.
University of South Florida