The present invention includes a novel method to fabricate corner cube retroreflectors, CCRs, where a majority of the wafer area acts as CCRs as compared to a maximum of 33% in previous MEMS CCRs. The present invention also allows for the fabrication of moveable cantilevers which operate at one-third the voltage as compared to a conventional planar cantilever.
Agarwal, Rahul; Bhansali, Shekhar; Onishi, Shinzo; and Samson, Scott, "Corner cube retroreflector" (2007). USF Patents. 625.
University of South Florida