Document Type
Patent
Publication Date
July 2012
Patent Number
8215171
Abstract
A ring electrode design that produces a uniform mass sensitivity distribution across a TSM device is presented. A new technique and apparatus to measure this mass sensitivity distribution is also presented. Novel electrode geometries on thickness shear mode (TSM) quartz resonators achieve radial uniformity of mass sensitivity, how receptive the device is to mass loadings, and high frequency stability across the active sensing area of the sensor device. The device allows for absolute mass measurement down to the nanogram level. Fabricated devices utilizing model predictions were tested using this apparatus, and good agreement between theory and experiment is found.
Application Number
12/547,976
Recommended Citation
Smith, Allan; Smith, legal representative, Charity F.; Bhethanabotla, Venkat R.; and Richardson, Anthony J., "Uniform mass sensitivity thickness shear mode quartz resonator" (2012). USF Patents. 338.
https://digitalcommons.usf.edu/usf_patents/338
Assignees
University of South Florida
Filing Date
08/26/2009
Primary/U.S. Class
73/80
