Shear-horizontal surface acoustic wave sensors with micro-cavities in the delay paths were studied using finite element methods. The microcavity devices are SAW delay path devices that have the delay path etched with square patterns at various wavelength dimensions and varying depths to increase the dispersion and bulk to surface wave conversion. Additionally the microcavities are filed with polystyrene to act as an inhomogeneous waveguide for further entrapment of wave energy near the device surface. The effects of micro-cavities and grooves on SAW propagation show significantly greater energy transmission than the other structures presented traditional sensors.
Cular, Stefan and Bhethanabotla, Venkat R., "Microcavity enhanced surface acoustic wave devices" (2012). USF Patents. 288.
University of South Florida