Document Type
Patent
Publication Date
October 2013
Patent Number
8563354
Abstract
A novel 2 step solid source deposition (2SSS) method to form an absorber layer in the manufacture for CIGS solar modules. 2-step refers to a first step of deposition of metals followed by second step of selenization of the metal stack. Metals are first deposited and then selenized in an adjacent chamber. Differential pumping is used to control egress of Se vapor into the sputtering region and prevent contamination of the targets. Products made by the method demonstrate comparable quality and performance to those produced by current processing techniques. The 2SSS method provides means for attaining improved uniformity of large area films which improves yield and cost-effectiveness.
Application Number
13/253,442
Recommended Citation
Morel, Don, "Advanced 2-step, solid source deposition approach to the manufacture of CIGS solar modules" (2013). USF Patents. 250.
https://digitalcommons.usf.edu/usf_patents/250
Assignees
University of South Florida
Filing Date
10/05/2011
Primary/U.S. Class
438/95
