Document Type
Patent
Publication Date
December 2014
Patent Number
8920700
CPC
B82Y 40/00(20130101), B26D 7/10(20130101), B26D 3/085(20130101), B26D 3/065(20130101), G01Q 70/12(20130101), G01Q 60/24(20130101)
Abstract
A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.
Application Number
13/023,782
Recommended Citation
Popescu, Adrian and Woods, Lilia M., "Telescopic nanotube device for hot nanolithography" (2014). USF Patents. 183.
https://digitalcommons.usf.edu/usf_patents/183
Assignees
University of South Florida
Filing Date
02/09/2011
Primary/U.S. Class
264/293
