Graduation Year


Document Type




Degree Granting Department

Electrical Engineering

Major Professor

Dr. Shekhar Bhansali.


Fpw, Pzt, Fabrication process, Sol-gel deposition, Piezoelectricity


Current MEMS development is driven by the need to develop various 'Miniaturized Total Chemical Analysis Systems ([mu]TAS), biological and chemical sensing, drug delivery, molecular separation, microfiltration, amplification, and sequencing systems. In this work, the use of flexural plate wave devices as an actuator has been investigated.This research was done with the aim of developing a platform to build FPW devices for use in System-On-Chip applications. It is well known that acoustic forces generated by a flexural plate wave (FPW) device can cause fluid motion, by the principle of acoustic streaming. Also the proven ability of FPW devices to cause mixing, filtration and to work as a chemical-biological sensor can be used towards building a micromachined [mu]TAS. The effects of the IDT finger width, spacing, aperture, membrane thickness, and driving conditions on the device performance was studied to understand the impact of IDT design on device performance.