Degree Granting Department
Muhammad M. Rahman, Ph.D.
Ashok Kumar, Ph.D.
Steady state, Transient analysis, Conjugate heat transfer with spinning boundaries, Slurry abrasive particles, CMP temperature distributions
Scholar Commons Citation
Lallave-Cortes, Jorge C., "Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling" (2009). Graduate Theses and Dissertations.