The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar waveguide and at least one direct current actuatable contact switch positioned to vary the effective width of a narrow inductive section of the center conductor of the CPW line upon actuation the DC contact switch.
Weller, Thomas; Lakshminarayanan, Balaji; and Balachandran, Srinath, "Tunable micro electromechanical inductor" (2007). USF Patents. 639.
University of South Florida