A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine environment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.
Bhansali, Shekhar; Langebrake, Lawrence C.; and Bhat, Shreyas, "MEMS based conductivity-temperature-depth sensor for harsh oceanic environment" (2008). USF Patents. 615.
University of South Florida