The present invention provides a novel technique for the fabrication of MEMS igniters and detonators. According to a particular embodiment of the present invention, the device is built based on two-plates. Plate one contains the resistive heating element and plate two contains the explosive cavity. With the present invention, micro igniters and detonators are batch fabricated utilizing a glue-less assembly technique and self-aligning capability.
Bhansali, Shekhar, "Method of fabricating MEMS-based micro detonators" (2011). USF Patents. 433.
University of South Florida