Document Type
Patent
Publication Date
May 2013
Patent Number
8437062
Abstract
The present invention provides an improved electrostatic micro actuator array system comprising a plurality of electrostatic micro actuators, each of the micro actuators further comprising at least one hold-down electrode and at least two pull-down electrodes positioned to actuate the micro actuator. A hold-down signal line is then coupled to each of the hold-down electrodes of each of the plurality of micro actuators and a plurality of first pull-down signal lines coupled to one of the at least two pull-down electrodes of each micro actuator and a plurality of second pull-down signal lines coupled to another of the at least two pull-down electrodes of each micro actuator, the first pull-down signal lines and the second pull-down signal lines configured in a cross-point matrix such that a unique pair of first pull-down signal lines and second pull-down signal lines is associated with each of the plurality of micro actuators.
Application Number
13/446,248
Recommended Citation
Samson, Scott; Kedia, Sunny; Upadhyay, Vandana; and Agarwal, Rahul, "Electrostatically-addressed MEMS array system and method of use" (2013). USF Patents. 215.
https://digitalcommons.usf.edu/usf_patents/215
Assignees
University of South Florida
Filing Date
04/13/2012
Primary/U.S. Class
359/200
