Graduation Year

2005

Document Type

Thesis

Degree

M.S.E.E.

Degree Granting Department

Electrical Engineering

Major Professor

Dr. Shekhar Bhansali.

Co-Major Professor

Dr. Scott Samson.

Keywords

Thermal actuator, Polymumps, Anodic bonding, Gear, Pirl

Abstract

This thesis presents the design and fabrication of a re-configurable micromirror array which can be used as a component of an optical microspectrometer. In an optical microspectrometer, an array of mechanically positionable micromirrors can be implemented as a reconfigurable exit slit to selectively focus particular wavelengths of a diffracted spectrum onto the detector stage. The signal to noise ratio and response time of an optical microspectrometer can be vastly improved by this technique. In the approach presented here, a hybrid bulk- and surface- micromachining process is demonstrated for fabrication of a 1XN array of micromirrors. The reconfigurable micromirrors presented here comprise of two elements, a surfacemicromachined positioning mechanism, and a bulk-micromachined mirror. These elements are finally integrated using a flip-chip bonding technique.

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